In Part I, the method of moments (MoM) using numerically-derived eigenmode basis functions is proposed, which is efficient analysis for slots with uniform shape in the wall thickness of a waveguide. As an example, a waveguide crossed slot is analyzed and the accuracy of the analysis is confirmed in Chapter 2. A waveguide matching crossed slot,  which is used as a terminal element in a leaky-waveguide crossed slot array, is analyzed and designed in Chapter 3. It radiates all of the residual power in a circularly polarized wave toward the tilted-beam direction. Radiation of circularly polarized wave is realized by degeneracy separation method and is interpreted as a sum of two eigenmode basis functions. A leaky-waveguide crossed slot array is analyzed and designed in Chapter 4. The initial slot parameters, which are designed using unit-cell model, are modified by the linear array analysis to consider the finite truncation of the array. Chapter 5 presents analysis and design of circularly-polarized slot radiators on the shorting plate of a rectangular waveguide. For example, a notched annular ring slot, a crossed slot and an elliptical annular ring slot are examined.
In Part II, the generalized scattering matrix (GSM)-method of moments (MoM)/FDTD analysis of a unit-cell of the 1m2-ordered plasma excitation single-layer slotted waveguide array is presented. Chapter 6 presents GSM-MoM analysis of the unit-cell of the array, neglecting the plasma and chamber. The uniform electromagnetic field aperture distribution on the vacuum window is realized. Chapter 7 presents GSM-MoM/FDTD analysis of the unit-cell of the array, considering the plasma. The effect of plasma is approximately analyzed by the FDTD method with measured plasma parameters. An array with uniform plasma density distribution is designed by the GSM-MoM/FDTD analysis of the unit-cell, and its total characteristic is analyzed by the GSM method. The method to improve the uniformity by modifying the initial array is presented.